Beijing natsu precision technology co. LTD

Nanopositioning performance and high speed in a compact, economical platform design
Linear travel ranges of 60, 110 and 160 mm
Minimum incremental linear motion to 10 nm
High-precision position encoder options: incremental and absolute measurement
Compact dimensions: 135 mm × 45 mm cross-section
Crossed roller guides with high load capacity and high geometry
Ironless three-phase linear motor

E-UMS130-X series adopts high-precision cross roller guide with anti-crawling function, with linear motor and high-resolution grating ruler, which has the advantages of small size, large load and low noise. Anti-peristaltic cross roller guides are particularly suitable for applications that require a fine step stroke, with
The high-performance drive control system can achieve 10nm step size and stable stepout, which is an important performance that ordinary linear guide linear motor platforms cannot guarantee. Therefore, the UMS130-X series is particularly suitable for high-precision positioning, inspection, exposure and micromachining applications.
● Non-contact direct drive motor, ultra-high precision and excellent dynamic performance
● Ironless motor, speed fluctuation is less than 1/1,000 (combined with specified model drive, laboratory environment test data)
● Silent anti-peristaltic guide rail ensures microstep control