Beijing natsu precision technology co. LTD

The air flotation platform overcomes the shortcomings of the traditional mechanical positioning table such as short stroke, large response hysteresis, friction resistance, etc., realizes the long-stroke high-precision and high-speed positioning function, and plays an irreplaceable role in semiconductor lithography equipment, precision measurement and biomedical fields.

2. High repeatability positioning, small pitch and tilt angle, the same material is used for the motion table and guide rail, and the common "locking" phenomenon of air floating platform will not occur under the working conditions of large temperature changes.

Peculiarity:

By isolating the contact between mechanical motion pairs by static pressure air flotation, improving the motion accuracy of the platform mechanism, smooth surface, slight deviation (pitch, deflection, etc.), stable performance, no mechanical loss, and "zero" friction can make it enter nanoscale applications.

Place of use:

Precision machining, precision measurement, microelectronics manufacturing, lithography machine platform, semiconductor processing industry, scanning.